Basic Introduction
HIPER can provide special tantalum carbide (TaC) coatings for various components and carriers. Through Hengpu's industry-leading coating process, tantalum carbide (TaC) coating can obtain high purity, high temperature stability and high chemical resistance, which can improve the product quality of SIC/GAN crystal and EPI layer, and prolong the life of critical reactors. Component life. The use of tantalum carbide TaC coating is to solve the edge problem and improve the quality of crystal growth, which is one of the core technical directions of "growing fast, growing thick and growing". In order to promote the development of industry technology and solve the dependence on "import" of key materials, HIPER has made a breakthrough in solving the tantalum carbide coating technology (CVD), which has reached the international advanced level.
Main Features
Ultra high purity
Ultra-high purity avoids impurities and contamination
High temperature stability
2500°C internal high temperature stability for ultra-high temperature operation
Chemical environment tolerance
Resistance to H2,NH3, SiH4 and Si for
protectionin harsh chemical environments
Long life without shedding
The strong bonding force can ensure that the coating
does not fall off during the longevity surface cycle
Thermal Shock Resistance
Thermal shock resistance speeds up operating cycles
Tight dimensional tolerances
Tantalum carbide coating coverage meets tight dimensional tolerances
Parameters Table
| Item | Parameter |
|---|---|
| Density | 14.3 （gm/cm3） |
| Emissivity | 0.3 |
| CTE（×10-6/K) | 6.3（×10-6/K) |
| Hardness（HK) | 2000 |
| Resistance(Ohm-cm) | 1×10-5（Ohm-cm） |
| Thermal Stability | ＜2500℃ |
| Graphite Dimension Change | -10~-20um（Reference） |
| Coating thickness | ≥20um typical value（35um±10um） |
| The above are typical values |
Contact Us
China/Overseas Business Department: David Zou
Mobile: 13567416699
E-mail: xiangwei.zou@hiper.cn
In case of any problem, HIPER welcomes your call!